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Magnetron Sources

We fabricate magnetron sputter sources with a patented design.

The magnetrons are compatible with disc-shaped targets of diameters between 1/2" and 4". These sources operate with noble gases at low pressure and, with them, thin films of a variety of inorganic, including ferromagnetic, materials may be obtained with competitive and controllable deposition rates. These sources have been developed in collaboration with the University of Castilla La Mancha.