The following aspects may be personalised:
- Number of magnetron sources.
- Diameter of the sources (1/2, 1, 2, 3 or 4”).
- Power supply of the sources (DC or RF).
- Length of the sources.
- Relative positioning of the sources in the x-y plane.
- Size and type of flange with which the sources are mounted.
Each magnetron has its own system, which allows the relative positioning of the sources to be controlled in the z-plane. Every bellow has a maximum extension or contraction of 100mm.
- Gas line for each magnetron
- Cooling liquid in and out lines for every magnetron.
- High tension cable for every magnetron.
- Aggregation gas line in the mounting flange.
All of our nano-aggregate sources come with our under guarantee and are tested in ultra high vacuum for the absence of leaks.