- Pre-chambers: For sample introduction
- Ion sources
- Deposition sources
- Power supplies
- Sample holders: We have stationary and rotary models with various diameters. It is also possible to heat the holders in a controlled range of temperatures.
- Thickness control: We supply automatic shutters for sources, thickness monitors and equipment to follow and control the film thickness.
- Vacuum equipment: We offer vacuum pumps (rotary and turbomolecular), vacuum controllers and other vacuum instrumentation.
- Technical service: We perform reparation, modification, extension and automation of thin film systems.